COBRA BC vacuum pumps are perfectly suited for tasks in load lock and transfer chambers. Further applications are among others metrology, lithography, physical vapor deposition, rapid thermal annealing and silicon etch.

The patented self-balancing screw design ensures lowest vibration levels and quiet operation.

The screws of COBRA BC vacuum pumps are manufactured from a single-piece casting avoiding any gaps. This makes an ingress of process fluids or particles impossible. Thus, corrosion and deposition are prevented.

COBRA BC vacuum pumps feature a bell-shaped cantilever construction: The twin rotor with variable pitch screws is mounted only on the motor side. Thanks to the unique “flying bearing” design, inlet bearings are unnecessary. Therefore, the pumped medium does not come in contact with the bearings. This ensures clean vacuum generation and allows to fully recover the pumped medium.

COBRA BC series vacuum pumps use efficient direct water cooling. An even temperature distribution throughout the pump body is therefore maintained. Moreover, thermal stability during the process is ensured.

The fully open communication protocol (Modbus TCP-IP) allows to control all functionalities. This includes idle modes and variable speed drive. The communication protocol can easily be adapted to a specific network protocol using standard interface components.

A directly mounted, canned motor makes the dimensions of the COBRA BC series very compact. Due to their fit-in-place design, they can be easily and quickly retrofitted to existing systems.