ULVAC Mechanical Booster Pumps PRC Series

By using together with dry vacuum pumps, oil rotary vacuum pumps or water-sealed vacuum pumps, mechanical booster pumps can increase pumping speed in the range between 10kPa to 0.1 Pa, where roughing pump pumping speed drops. The PRC series is designed for semiconductor and liquid crystal display processes which especially require cleanliness. Atmospheric pressure start type can be selected as option.

Features

• Oil-free
  No oil in the pump casing, results in stable performance even when evacuating water vapor or solvent vapors.
• Canned motor
  Using of canned motor could avoid using mechanical seal between atmosphere and vacuum. It can be used in clean environment without oil leak concern.
• Excellent Corrosion Resistant Surface Treatment
  Anodic oxide coating for surface hardness and corrosive resistance on main parts can prevent scratch and corrosion inside the pump. Nonsurface treatment can be selected as option.
• Atmospheric Pressure Start type for Shorter Evacuation Type (Option: Inverter)
  This type can shorten pumping time compared with standard type because the pump starts at the same time of roughing pump.

Applications

• Evaporation, sputtering, ion plating
• Vacuum dryer, freeze dryer, vacuum degassing
• Analytical instruments, leak test system
• Gas exchange, filling, vacuum insulating
• Heat treatment, melting furnace
• Other various kind of vacuum system